Silicon Tetrachloride (STC) Cas 10026-04-7
As a silicon source gas for electronic industry, Silicon Tetrachloride (STC) also widely used in silicon epitaxy and the preparation of silicon containing films such as silicon nitride film, silicon oxide film and so on.
Substance identity
Name: Silicon Tetrachloride
IUPAC name: silicon(4+) tetrachloride
EC / List no.: 233-054-0
CAS no.: 10026-04-7
Mol. formula: Cl4Si
Trade names:
Chlorid kremicity
Silane, tetrachloro-
Silicio(tetracloruro di)
Silicium(tetrachlorure de)
Silicon chloride
Silicon chloride (SiCl4)
Silicon tetrachloride
Tetrachlorosilicon
Tetrachlorure de silicium
chlorosilane
Silicon (IV) chloride
silicon(4+) tetrachloride
Silicontetrachloride
Tetrachlorosilane
1-2102
1-2102 SILICON TETRACHLORIDE
Z-1229
Z-1229 chlorosilane
Siridion(R) STC
STC
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Items
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Specification
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SiCl4 (Based
on Metals)
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≥99.9999999%
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SiCl4 (By GC)
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≥99.999%
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Resistivity
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≥500ohm.cm
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