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Methylsilane 992-94-9

Product Item : 992-94-9
Grade: Electronic Grade
Cas: 992-94-9
EC No.: 213-598-5
Purity: 99.8%min
Product description：As an important silicon source gas in semiconductor industry, methylsilane (CH3-SiH3) is mainly used in the formation of ge-si-c layer in epitaxial chemical vapor deposition.
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Electronic grade Methylsilane Cas No. 992-94-9

As an important silicon source gas in semiconductor industry, methylsilane (CH3-SiH3) is mainly used in the formation of ge-si-c layer in epitaxial chemical vapor deposition.

Specification: