Electronic grade Methylsilane Cas No. 992-94-9
As an important silicon source gas in semiconductor industry, methylsilane (CH3-SiH3) is mainly used in the formation of ge-si-c layer in epitaxial chemical vapor deposition.
Specification:
Items
Spec.
Purity
≥99.80%
N2
≤10ppmv
Ar+O2
≤2ppmv
CO2
≤10ppmv
CH4
≤50ppmv
SiH4
≤50ppmv
Other
Methylsilanes
≤50ppmv
Chlorosilanes
≤50ppmv
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