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Methylsilane 992-94-9

Methylsilane 992-94-9

  • Product Item : 992-94-9
  • Grade: Electronic Grade
  • Cas: 992-94-9
  • EC No.: 213-598-5
  • Purity: 99.8%min
  • Product description:As an important silicon source gas in semiconductor industry, methylsilane (CH3-SiH3) is mainly used in the formation of ge-si-c layer in epitaxial chemical vapor deposition.
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Electronic grade Methylsilane Cas No. 992-94-9

As an important silicon source gas in semiconductor industry, methylsilane (CH3-SiH3) is mainly used in the formation of ge-si-c layer in epitaxial chemical vapor deposition.

Specification:

Items Spec.
Purity 99.80%
N2 10ppmv
Ar+O2 2ppmv
CO2 10ppmv
CH4 50ppmv
SiH4 50ppmv
Other Methylsilanes 50ppmv
Chlorosilanes 50ppmv


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