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TCS Trichlorosilane 10025-78-2

TCS Trichlorosilane 10025-78-2

  • Product Item : 10025-78-2
  • 10025-78-2
  • Product description: Trichlorosilane (also known as trichlorosilane,TCS) is a kind of silicon source gas used in electronic industry. It is commonly used in the preparation of silicon nitride film, silicon oxide film an
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Electronic Grade TCS Trichlorosilane 10025-78-2

Trichlorosilane (also known as trichlorosilane,TCS) is a kind of silicon source gas used in electronic industry. It is commonly used in the preparation of silicon nitride film, silicon oxide film and other silicon containing films on silicon epitaxy and growth integrated circuits. It is also the raw material for the production of semiconductor silicon and monocrystalline silicon, and the synthesis of organosilane and alkyl, aromatic and organic groups chloroform silane. It is the most basic monomer in organosilane coupling agent.


Product Name: Trichlorosilane/TCS
Mol. Formula: Cl3HSi
Cas No: 10025-78-2
EC / List no.: 233-042-5


Items Specification
SiHCl3 (Based on Metals) 99.999999%
SiHCl3 (By GC) 99.99%
Resistivity ≥1000ohm.cm

Trade names:
Silane A-19
Silane, trichloro-
Silici-chloroforme
Siliciumchloroform
Silicochloroform
Silicon chloride hydride (SiHCl3)
Trichloromonosilane
trichloorsilaan
trichlorosilan
trichlorosilane
trichlorsilan
trichlorsilanas
trichlórsilán
triclorosilano
triclorossilano
triclorsilan
trihlorsilāns
trikloorisilaani
Triklorosilaan
triklorosilan
triklorsilan
triklórszilán
τριχλωροσιλάνιο
трихлоросилан
chlorosilane
trichlorosilane, TCS
trichlorosilane-
Trichlorosilicon
Q1-2333
CHEMICAL GRADE TRICHLOROSILANE
Q1-2333 CHEMICAL GRADE TRICHLOROSILANE
Trichlorosilane technical
Siridion(R) TCS



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