Electronic Grade Dichlorosilane (DCS) 4109-96-0
As a silicon source gas for electronic industry, dichlorosilane (DCS) is mainly used in silicon epitaxy and the preparation of silicon containing films such as silicon nitride film, silicon oxide film and so on.
Product Name: DiChlorosilane/DCS
Mol. Formula: Cl2H2Si
Cas No: 4109-96-0
EC / List no.: 223-888-3
IUPAC Name: dichlorosilicon, Dichlorsilane
Items | Specification |
SiH2Cl2 (Based on Metals) | ≥99.999999% |
SiH2Cl2 (By GC) | ≥99.99% |
Resistivity | ≥400ohm.cm |
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