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DCS Dichlorosilane 4109-96-0

DCS Dichlorosilane 4109-96-0

  • Product Item : 4109-96-0
  • Content: 99.999999%min
  • Content by GC:99.99%Min
  • IUPAC Name:dichlorosilicon
  • Grade: Electronic Grade
  • Product description:As a silicon source gas for electronic industry, dichlorosilane is mainly used in silicon epitaxy and the preparation of silicon containing films such as silicon nitride film, silicon oxide film and s
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Electronic Grade Dichlorosilane (DCS) 4109-96-0

As a silicon source gas for electronic industry, dichlorosilane (DCS) is mainly used in silicon epitaxy and the preparation of silicon containing films such as silicon nitride film, silicon oxide film and so on.


Product Name: DiChlorosilane/DCS
Mol. Formula: Cl2H2Si
Cas No: 4109-96-0
EC / List no.: 223-888-3
IUPAC Name: dichlorosilicon, Dichlorsilane


Items Specification
SiH2Cl2 (Based on Metals) 99.999999%
SiH2Cl2 (By GC) 99.99%
Resistivity 400ohm.cm

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