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DCS Dichlorosilane 4109-96-0

Product Item : 4109-96-0
Content: 99.999999%min
Content by GC:99.99%Min
IUPAC Name:dichlorosilicon
Grade: Electronic Grade
Product description：As a silicon source gas for electronic industry, dichlorosilane is mainly used in silicon epitaxy and the preparation of silicon containing films such as silicon nitride film, silicon oxide film and s
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Electronic Grade Dichlorosilane (DCS) 4109-96-0

As a silicon source gas for electronic industry, dichlorosilane (DCS) is mainly used in silicon epitaxy and the preparation of silicon containing films such as silicon nitride film, silicon oxide film and so on.

Product Name: DiChlorosilane/DCS
Mol. Formula: Cl2H2Si
Cas No: 4109-96-0
EC / List no.: 223-888-3
IUPAC Name: dichlorosilicon, Dichlorsilane